28 results
S-3ASR
EX-4.1
ACLS
Axcelis Technologies Inc
3 Aug 23
Automatic shelf registration
3:14pm
and scope of the examination or investigation upon which the statements or opinions contained in such certificate or opinion are based;
(3 … ) a statement that, in the opinion of such Person, it or he has made such examination or investigation as is necessary to enable it or him to express an informed
S-3ASR
EX-4.1
ek857
29 May 20
Automatic shelf registration
12:14pm
8-K
EX-10.1
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4 Dec 12
Axcelis Technologies and Lam Research Enter Strategic Collaboration Agreement on Ion Implant, Dry-Strip, and Etch
12:00am
8-K
EX-10.1
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27 Feb 09
Entry into a Material Definitive Agreement
12:00am
8-K
EX-10
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4 May 06
Entry into a Material Definitive Agreement
12:00am
8-K
EX-4
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4 May 06
Entry into a Material Definitive Agreement
12:00am
8-K
jxh00e13d3
28 Jun 05
Entry into a Material Definitive Agreement
12:00am